登录 注册 忘记密码
当前位置:首页>>制造装备>>查看内容
德国PI公司纳米位移工作台P-561 • P-562 • P-563 PIMars Nanopositioning Stage
关键词:
发布时间:2017/1/16 20:48:58                                     【字号:  】                                             【打印】 

P-561 • P-562 • P-563 PIMars Nanopositioning Stage

High-Precision Nanopositioning System for up to 6 Axes

 


P-561.3CD
P-561.3CL

P-562.3CD
P-562.3CL

P-563.3CD
P-563.3CL

P-561.3DD

Unit

Tolerance

PIMars XYZ piezo-nanopositioning system, closed-loop travel

100 × 100 × 100

200 × 200 × 200

300 × 300 × 300

45 × 45 × 15, direct drive

µm

 


Motion and positioning

 

 

 

 

 

 

Integrated sensor

Capacitive

Capacitive

Capacitive

Capacitive

 

 

Open-loop travel, -20 to 120 V

150 × 150 × 150

300 × 300 × 300

340 × 340 × 340

58 × 58 × 18

µm

min. (+20% / -0%)

Open-loop resolution

0.2

0.4

0.5

0.1

nm

typ.

Closed-loop resolution

0.8

1

2

0.2

nm

typ.

Linearity error

0.03

0.03

0.03

0.01*

%

typ.

Repeatability in X / Y / Z

2 / 2 / 2

2 / 2 / 4

2 / 2 / 4

2 / 2 / 2

nm

typ.

Pitch in X, Y

±1

±2

±2

±3

µrad

typ.

Crosstalk θX, θY (motion in Z)

±15

±20

±25

±3

µrad

typ.

Yaw in X, Y

±6

±10

±10

±3

µrad

typ.

Flatness in X, Y

±15

±20

±25

±10

nm

typ.

Crosstalk in X, Y (motion in Z)

±30

±50

±50

±20

nm

typ.


Mechanical properties

 

 

 

 

 

 

Unloaded resonant frequency in X / Y / Z

190 / 190 / 380

160 / 160 / 315

140 / 140 / 250

920 / 920 / 1050

Hz

±20 %

Resonant frequency at 100 g in X / Y / Z

 -

145 / 145 / 275

120 / 120 / 215

860 / 860 / 950

Hz

±20 %

Resonant frequency at 330 g in X / Y / Z

140 / 140 / 300

130 / 130 / 195

110 / 110 / 170

500 / 500 / 470

Hz

±20 %

Push force capacity in motion direction in X / Y / Z

200 / 200 / 50

120 / 120 / 50

100 / 100 / 50

200 / 200 / 50

N

max.

Pull force capacity in motion direction in X / Y / Z

30 / 30 / 30

30 / 30 / 30

30 / 30 / 30

30 / 30 / 30

N

max.

Load capacity

50

50

50

50

N

max.


Drive properties

 

 

 

 

 

 

Piezo ceramic

PICMA® P-885

PICMA® P-885

PICMA® P-885

PICMA® P-885 in Z, P-888 in XY

 

 

Electrical capacitance in X / Y / Z

5.2 / 5.2 / 10.4

7.4 / 7.4 / 14.8

7.4 / 7.4 / 14.8

38 / 38 / 6

µF

±20 %

Dynamic operating current coefficient (DOCC) in X / Y / Z

6.5 / 6.5 / 13

4.6 / 4.6 / 9.25

3.1 / 3.1 / 6.1

106 / 106 / 50

µA / (Hz × µm)

±20 %


Miscellaneous

 

 

 

 

 

 

Operating temperature range

-20 to 80

-20 to 80

-20 to 80

-20 to 80

°C

 

Material

Aluminum

Aluminum

Aluminum

Aluminum

 

 

Mass

1.45

1.45

1.45

1.55

kg

±5 %

Sensor / voltage connection

CD version: Sub-D Special, 1.5 m cable

CL version: LEMO

 

 

 

[查看评论]  已有0参与评论