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重点研究组
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研究组
Nanostructure Laboratory

 Introduction:
  NSL is equipped with a variety of state-of-the-art nanofabrication and nanodevice characterization facilities from ultrahigh resolution electron beam lithography, nanoimprint lithography, interference lithography, thermal and e-beam evaporators and sputtering systems, and RIE etchers to scanning electron and scanning force microscopes, wavelength tunable femtosecond lasers, electric and magnetic measurement systems, and polymer characterization.
  Our previous work includes used invention and pioneering developments of new nanofabrication methods (i.e. nanoimprint lithography (NIL), laser assisted direct imprint (LADI), lithographically induced self-assembly (LISA), and self-perfection by liquefaction (SPEL)); a new paradigm in magnetic data storage--quantized magnetic disks (QMDs)(now called patterned media); the first room-temperature Si single electron memories, the first sub20 nm fluidic channels for biodetections; the first SOE polarizers, phase-plates, switches by NIL; and the first 510GHz MSM photodetectors.

Mission:
  New nanotechnologies that will fabricate structures substantially smaller, better, and cheaper than current technology permits.
  Innovative nanoscale electronic, optoelectronic, magnetic and biological devices and meta-materials by combining cutting-edge nanotechnology with frontier knowledge from different disciplines.
Leader:
Stephen Y. Chou
  Joseph C. Elgin Professor of Engineering and Professor of Electrical Engineering
  Ph.D. 1986, Massachusetts Institute of Technology
  Advances in nanotechnology are offering great opportunities for innovation and discovery in many engineering and scientific areas. This is because as structures become smaller than some fundamental physical length scales, many conventional theories no longer apply.
  My group, the NanoStructure Laboratory (NSL) at Princeton, has two primary missions: (A) to develop new nanotechnologies for fabricating structures substantially smaller, better, and cheaper than current technology permits; and (B) to explore innovative nanodevices and advanced materials in electronics, optics, optoelectronics, magnetics and biology, by combining cutting-edge nanotechnology with frontier knowledge from different disciplines.

 

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